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Journal of Applied Physics : Study of laser excited vibration of silicon cantilever

By Yaqin Song, Bernard Cretin, D. M. Todorovic, and Pascal Vairac

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Book Id: WPLBN0002169470
Format Type: PDF eBook :
File Size: Serial Publication
Reproduction Date: 20 November 2008

Title: Journal of Applied Physics : Study of laser excited vibration of silicon cantilever  
Author: Yaqin Song, Bernard Cretin, D. M. Todorovic, and Pascal Vairac
Volume: Issue : November 2008
Language: English
Subject: Science, Physics, Natural Science
Collections: Periodicals: Journal and Magazine Collection, Journal of Applied Physics Collection
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Publisher: American Institute of Physics

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Bernard Cretin, D. M. Todorovic, And Pascal Vaira, Y. S. (n.d.). Journal of Applied Physics : Study of laser excited vibration of silicon cantilever. Retrieved from http://gejl.info/


Description
Description: In this paper an interferometric setup called “thermoelastic microscopy” has been used to measure the vibration response of the semiconductor cantilevers under modulated laser thermal source. The small vibration amplitude has been detected well below 10 pm magnitude in accurate adjustment conditions. The results showed that experimental responses have a good agreement with the theoretical ones. Also from the analysis we could conclude that the signal amplitude has a power functional dependence on the modulation frequency and that the phase angle linearly depended on the square root of modulation frequency.

 
 



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